During the 90's some researches in the field of Software Architecture realized benefits of using formal methods and languages to describe software architectures. Generally speaking, such a description allows to analyze and predict properties of a software system before it is even being built and thus increases the quality of software (with respect to the corresponding requirements) a lot. Another domain where such descriptions are needed is dynamically configured systems with a dynamic architecture; here such descriptions enable a system to know about it's current structure and properties. Relevant for areas are for instance Ubiquitous Computing and most likely for Semantic Web Services. The aim of this thesis is to come up with a survey on existing work in the field of Formal Software Architecture, Architecture Description Languages. In interesting question would be to find out about the relation and relevance to Semantic Web Service-based systems.